top of page

Vacuum Robot

Enhancing Robot Seal Performance

Rotary Vacuum Products' magnetic fluid seal units are designed to meet the demanding requirements of clean and vacuum robots across a variety of applications.


Our advanced technologies minimize center runout, improving positioning accuracy for larger FPD substrates and semiconductor wafers. We also offer customized solutions, including differential pressure seals and bellows seals for linear reciprocating motion, to address your specific needs.


Key Features and Benefits:

  • High-Precision Multi-Axial Seals: Achieve exceptional performance with tip displacement-free seals, leveraging advanced processing technologies developed in collaboration with Rigaku X-ray diffractometers.

  • Compact Multi-Axial Design: A unique magnetic circuit prevents magnetic field interference, enabling a compact seal design.

  • Large-Scale Seals: Utilizing precision processing of powerful magnets and pole pieces, we manufacture seals with diameters exceeding 100mm.

  • Thin, Dustproof Seals: Designed to withstand pressure differentials of up to 20kPa, our seals provide reliable dust protection.


Rotary Vacuum Products delivers innovative sealing solutions tailored to your high-precision robotic applications.

PRODUCTS

CATALOG

Get access to our product catalog.

CUSTOM

Need a custom solution?

Our tailored approach separates us from other feedthrough solutions. 

Contact us to be paired with a specialist. 

We are proud to have team members in every facet of our operations with at least a decade of first-hand professional experience in their roles, from new product custom engineering and design and just-in-time product assembly to rigorous quality control and inspection. 

We are committed to delivering best-in-class customer service. We are the very best at delivering highly customized solutions and welcome the opportunity to deliver the highest quality products in the market, along with 100% onshore customer support. 

Find the Feedthrough for your Application

Have a specific application need? Not sure what to request? Fill out our Application Development Sheet, and we will find the best fit for you.

bottom of page