Sputtering System
High-Temperature Magnetic Fluid Seals for Advanced Sputtering Systems
Sputtering is classified as a dry plating method, and plating can be done without exposing the coating object to liquid or high-temperature gas. There are various fields of application, but it is an indispensable technology for thin film deposition that requires high-quality for semiconductors and FPDs.
Rotary Vacuum Products' magnetic fluid seals are trusted components in sputtering systems used for manufacturing transparent conductive and antireflective coatings essential for solar cells, touchscreens, and flat panel displays.
Our seals are compatible with various sputtering methods, including facing target, ion beam, magnetron, ECR, and reactive sputtering systems.
Key Features and Benefits:
Minimal Magnetic Flux Leakage: Unlike traditional seals, our innovative magnetic circuit design ensures virtually no magnetic flux leakage. At a distance of 10 mm from the seal casing, leakage is comparable to geomagnetic levels, eliminating concerns about interference with plasma ions or electrons.
Versatile Application: Designed to perform reliably across diverse sputtering methods, supporting cutting-edge manufacturing technologies.
High-Temperature Durability: Built to withstand the demands of active gas environments in high-temperature operations.
With Rotary Vacuum Products’ magnetic fluid seals, you can achieve precision and reliability in sputtering processes without compromising performance or stability.
PRODUCTS
We are proud to have team members in every facet of our operations with at least a decade of first-hand professional experience in their roles, from new product custom engineering and design and just-in-time product assembly to rigorous quality control and inspection.
We are committed to delivering best-in-class customer service. We are the very best at delivering highly customized solutions and welcome the opportunity to deliver the highest quality products in the market, along with 100% onshore customer support.