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Ion Implanter

High-Speed Magnetic Fluid Seals with Precision and Durability

Ion implantation is used to change the properties of a substrate by accelerating the ionized atoms or molecules and implanting them into the substrate. In semiconductor manufacturing, electrical characteristics can be given by implanting boron or phosphorus into a silicon wafer.


Rotary Vacuum Products' advanced magnetic fluid seals deliver reliable high-speed rotation while minimizing center runouts and suppressing resonances.


Key Advantages:

  • Stable High-Speed Rotation: Proprietary technologies ensure smooth operation by effectively suppressing resonances, even at high rotational speeds.

  • Designed for Extreme Conditions: Our seals maintain long service life under high-temperature, high-vacuum, and high-load conditions, all while minimizing center runouts.

  • Versatility Across Applications: We provide magnetic fluid seal units tailored to the specifications of any type of ion implanter.


Rotary Vacuum Products combines innovation and precision to meet the demands of high-performance industrial applications.

PRODUCTS

CATALOG

Get access to our product catalog.

CUSTOM

Need a custom solution?

Our tailored approach separates us from other feedthrough solutions. 

Contact us to be paired with a specialist. 

We are proud to have team members in every facet of our operations with at least a decade of first-hand professional experience in their roles, from new product custom engineering and design and just-in-time product assembly to rigorous quality control and inspection. 

We are committed to delivering best-in-class customer service. We are the very best at delivering highly customized solutions and welcome the opportunity to deliver the highest quality products in the market, along with 100% onshore customer support. 

Find the Feedthrough for your Application

Have a specific application need? Not sure what to request? Fill out our Application Development Sheet, and we will find the best fit for you.

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