Rotary Vacuum Products' magnetic seals are optimized for the high-speed rotation, high vacuum conditions, and active gas environments required by MOCVD (Metal Organic Chemical Vapor Deposition) systems, making them ideal for epitaxial growth processes used in LED production.

Why Our Magnetic Seals Are Ideal for LED Manufacturing:

• Advanced Performance: Designed for high-speed rotation and reliable operation in environments with chloride and metal-organic gases.

• Versatile Compatibility: Suitable for various epitaxial growth systems, supporting the formation of GaAs, GaP, and GaN thin films on substrates like sapphire.

• Enhanced Durability: Ensures stable performance in demanding conditions, which is essential for producing high-quality LED materials.

What is Epitaxial Growth?

Epitaxial growth is the process of growing a single-crystal thin film with a specific orientation on a single-crystal substrate. This method is vital for manufacturing LEDs and other advanced semiconductors.

Key Methods in Vapor-Phase Epitaxial Growth:

1. MOCVD (Metal Organic Chemical Vapor Deposition): Utilizes metal-organic vapors and hydride gases to deposit semiconductor crystals via thermal decomposition on heated substrates.

2. MBE (Molecular Beam Epitaxy): Employs a molecular beam of evaporated materials in an ultra-high vacuum for precise crystal growth.

3. HVPE (Hydride Vapor Phase Epitaxy): Forms crystals by reacting chloride gases with hydride gases at high temperatures on the substrate.

Rotary Vacuum Products is proud to support cutting-edge epitaxial growth technologies, providing reliable magnetic seals that enable the efficient production of LEDs and other semiconductor devices.