CVD Equipment
High-Temperature Magnetic Fluid Seals for Active Gases
CVD is one of the thin film deposition technologies called chemical vapor deposition. The heated substrate is supplied with a gas containing the components to be film-formed, and the film is deposited by a chemical reaction on the substrate surface.
Rotary Vacuum Products has a long-standing history of supplying magnetic fluid seals to major CVD equipment manufacturers, with many officially integrating our seals into their products.
Through extensive research and testing, we have developed a new magnetic fluid that minimizes outgassing even at high temperatures. Paired with an enhanced magnetic fluid seal structure, this innovation enables the production of long-lasting seal units for CVD equipment, even in applications where seals were previously considered unsuitable.
Key Advantages:
High-Temperature Resistance: Our advanced magnetic fluid ensures reliable performance in active gas environments at elevated temperatures.
Enhanced Seal Longevity: The new fluid and optimized seal design extend the lifespan of seals in demanding CVD applications.
Precision and Stability: High-precision manufacturing and expert assembly deliver smooth, uniform seal rotation, supporting the formation of consistently thick films.
Rotary Vacuum Products continues to push the boundaries of sealing technology to meet the evolving demands of high-performance CVD systems.
PRODUCTS
We are proud to have team members in every facet of our operations with at least a decade of first-hand professional experience in their roles, from new product custom engineering and design and just-in-time product assembly to rigorous quality control and inspection.
We are committed to delivering best-in-class customer service. We are the very best at delivering highly customized solutions and welcome the opportunity to deliver the highest quality products in the market, along with 100% onshore customer support.